La2Zr2O7　(LZO)　buffer　layers　derived　by　metal　organic　deposition　(MOD)　were　epitaxially　grown　on　cube　textured　Ni5W　substrates　modified　with　an　island-distributed　LZO　seed　layer,　and　electron　backscattered　diffraction　(EBSD)　was　employed　to　characterize　the　crystallographic　relationship　of　the　{0　0　1}＜　1　1　0　＞　rotated　cube　textured　LZO　grains　with　respect　to　the　{0　0　1}＜　1　0　0　＞　cube　textured　Ni5W　substrate.　The　uniformly　distributed,　islanded　seed　layer　can　effectively　optimize　the　orientation　of　the　double-layered　LZO　films,　as　proved　by　X-ray　diffraction　and　EBSD　analyses.　It　is　concluded　that　the　accelerating　voltage　is　crucial　for　determinating　the　crystallographic　orientation　of　the　multilayer　sample.　Information　about　the　epi-layer　and　the　substrate　was　obtained　at　different　accelerating　voltages,　which　revealed,　in　particular,　a　superposed　pattern　of　both　layers.　(C)　2011　Acta　Materialia　Inc.　Published　by　Elsevier　Ltd.　All　rights　reserved.