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Abstract:
采用多弧离子镀技术制备单一的TiN薄膜和TiN/Cu纳米复合多层膜,研究了复合膜的硬度变化及相组成.初步探讨了TiN/Cu纳米复合多层膜的致硬机理.实验结果表明,Cu元素的掺人阻碍了TiN的生长,使复合膜硬度有了显著提高,制得硬度高达51GPa的TiN/Cu复合多层膜,其TiN以(111)和(200)两个晶面择优生长,且衍射峰强度极为接近,(200)面略高于(111)面.
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Source :
热加工工艺
ISSN: 1001-3814
Year: 2008
Issue: 8
Volume: 37
Page: 15-17,21
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