C/SiO2　multi-layer　films　(3-layer　films　and　5-layer　films)　were　obtained　by　sol-gel　method　and　physical　deposition　on　glass　plates,　and　then　heated　at　500　degrees　C　for　1　h　under　a　nitrogen　atmosphere.　The　mechanical　adhesive　force　with　the　substrate　of　the　multi-layer　films　was　sharply　enhanced　compared　to　the　as-deposited　amorphous　carbon　film.　An　absorption　layer　was　formed　on　heat　treated　C/SiO2　multi-layer　films　by　modification　of　the　surface　with　trimethylchlorosilane,　and　the　wettability　of　the　films　changed　from　hydrophilic　to　super-hydrophobic.　The　structures　of　the　physically　deposited　carbon　and　the　multi-layer　films　were　analyzed　by　X-ray　diffraction,　transmission　electron　microscopy　and　scanning　electron　microscopy.　The　experimental　results　showed　that　the　5-layer　films　had　a　concentric　ring　structure　that　caused　the　film　to　be　superhydrophobic.　(C)　2010　Elsevier　B.V.　All　rights　reserved.