The　aligned　TiO2　nanotube　thin　films　were　fabricated　on　the　Ti　substrate　in　NH4HF2+NH4HPO4　aqueous　solution　via　anodic　oxidation　method　at　room　temperature.　The　effects　of　electrolyte　solution,　outer　voltage,　and　pH　value　on　the　morphology　and　microstructure　of　TiO2　nanotube　array　thin　films　were　discussed　in　this　study.　The　growth　model　of　TiO2　nanotube　array　thin　films　was　created.　The　results　show　that　the　outer　voltage　has　lots　of　effect　oil　the　inicrostructure　of　TiO2　nanotube　array　thin　films,　the　TiO2　nanotube　array　thin　films　could　be　formed　only　with　the　Outer　voltage　of　3　similar　to　35　V,　and　their　diameter　of　TiO2　nanotube　in　the　range　of　30　similar　to　160　nm　increased　with　the　outer　voltage.　The　thickness　of　thin　films　was　greatly　affected　by　the　pH　value　of　the　electrolyte　solutions.　The　length　of　the　TiO2　nanotube　could　be　6.5　mu　m　by　adjusting　the　anodizing　factors.