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摘要:
(Ta2O5)1-x(TiO2)x system ceramics has been studied intensively as a promising dielectric material for next generation of high density dynamic random access memories instead of SiO2 and Si3N4. The (Ta2O5)1-x(TiO2)x ceramics with highly dielectric anisotropy can be obtained by applying relatively higher cold uniaxial pressure (200 MPa) and a high sintering temperature (1550 degrees C) to the cylindrical pellet. The dielectric permittivity of (Ta2O5)1-x(TiO2)x ceramics can be dramatically enhanced 1.5-1.8 times than the conventional disk specimen by cutting the cylindrical pellet parallel to the pressing axis. The mechanism of enhancement of dielectric constants is involved in the appearance of Hmon-TiTa18O47 solid-solution phase, preferentially grain growth and densification in (Ta2O5)1-x(TiO2)x ceramics. It is also suggested that the present work can be developed a sort of technology to enhance the physical properties of Ta2O5-based functional ceramics, esp. in dielectric properties.
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来源 :
FERROELECTRICS
ISSN: 0015-0193
年份: 2010
卷: 403
页码: 175-180
0 . 8 0 0
JCR@2022
ESI学科: PHYSICS;
JCR分区:4
中科院分区:4