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作者:

Deng Jin-Xiang (Deng Jin-Xiang.) (学者:邓金祥) | Zhang Xiao-Kang (Zhang Xiao-Kang.) | Yao Qian (Yao Qian.) | Wang Xu-Yang (Wang Xu-Yang.) | Chen Guang-Hua (Chen Guang-Hua.) | He De-Yan (He De-Yan.)

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摘要:

The optical properties of hexagonal boron nitride (h-BN) thin films were studied in this paper. The films were characterized by Fourier transform infrared spectroscopy, UV-visible transmittance and reflection spectra. h-BN thin films with a wide optical band gap E-g (5.86 eV for the as-deposited film and 5.97 eV for the annealed film) approaching h-BN single crystal were successfully prepared by radio frequency (RF) bias magnetron sputtering and post-deposition annealing at 970 K. The optical absorption behaviour of h-BN films accords with the typical optical absorption characteristics of amorphous materials when fitting is made by the Urbach tail model. The annealed film shows satisfactory structure stability. However, high temperature still has a significant effect on the optical absorption properties, refractive index n, and optical conductivity 7 of h-BN thin films. The blue-shift of the optical absorption edge and the increase of Eg probably result from stress relaxation in the film under high temperatures. In addition, it is found that the refractive index clearly exhibits different trends in the visible and ultraviolet regions. Previous calculational results of optical conductivity of h-BN films are confirmed in our experimental results.

关键词:

sputtering UV-visible hexagonal boron nitride films optical properties

作者机构:

  • [ 1 ] [Deng Jin-Xiang]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100124, Peoples R China
  • [ 2 ] [Zhang Xiao-Kang]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100124, Peoples R China
  • [ 3 ] [Wang Xu-Yang]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100124, Peoples R China
  • [ 4 ] [Chen Guang-Hua]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100124, Peoples R China
  • [ 5 ] [Zhang Xiao-Kang]Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China
  • [ 6 ] [Yao Qian]Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China
  • [ 7 ] [He De-Yan]Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Peoples R China

通讯作者信息:

  • 邓金祥

    [Deng Jin-Xiang]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100124, Peoples R China

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来源 :

CHINESE PHYSICS B

ISSN: 1674-1056

年份: 2009

期: 9

卷: 18

页码: 4013-4018

1 . 7 0 0

JCR@2022

ESI学科: PHYSICS;

JCR分区:2

中科院分区:1

被引次数:

WoS核心集被引频次: 28

SCOPUS被引频次:

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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