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作者:

Da XiaoLi (Da XiaoLi.) | Shen GuangDi (Shen GuangDi.) | Xu Chen (Xu Chen.) (学者:徐晨) | Zou DeShu (Zou DeShu.) | Zhu YanXu (Zhu YanXu.) | Zhang JianMing (Zhang JianMing.)

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Scopus SCIE

摘要:

In order to obtain higher light output power, the flip-chip structure is used. We studied the ratio of the light of GaN sides before and after fabricating metal reflector on p-GaN. The SiO2/SiN (x) dielectric film reflectors were deposited through plasma enhance chemical vapor deposition following the fabrication of metal reflector, and then the dielectric film reflectors on the electrodes were etched in order to expose the electrodes to the air. It is found that comparing with the flip-chip GaN-LED without dielectric film reflectors, light output power can be increased by as high as 10.2% after the deposition of 2 pairs of SiO2/SiN (x) dielectric film reflectors on GaN-LEDs, which cover the sidewalls and the areas without the metal reflector. This result indicates that the high reflector formed by multi-layer dielectric films is useful to enhance the light output power of GaN-based LED, which reflects light from step sidewalls and p-GaN without metal reflector to internal, and then light emits from the surface.

关键词:

plasma enhanced chemical vapor deposition light emitting diodes SiO2/SiNx dielectric film reflectors GaN

作者机构:

  • [ 1 ] [Da XiaoLi]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 2 ] [Shen GuangDi]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 3 ] [Xu Chen]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 4 ] [Zou DeShu]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 5 ] [Zhu YanXu]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China
  • [ 6 ] [Zhang JianMing]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China

通讯作者信息:

  • [Da XiaoLi]Beijing Univ Technol, Inst Elect Informat & Control Engn, Beijing Optoelect Technol Lab, Beijing 100124, Peoples R China

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来源 :

SCIENCE IN CHINA SERIES F-INFORMATION SCIENCES

ISSN: 1009-2757

年份: 2009

期: 8

卷: 52

页码: 1476-1482

JCR分区:4

中科院分区:1

被引次数:

WoS核心集被引频次: 1

SCOPUS被引频次: 4

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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