A　new　microlens　fabrication　method　using　an　excimer　laser　is　described　in　this　paper.　This　method　is　based　on　the　light　vignetting　effect.　An　excimer　laser　beam　was　propagated　through　two　groups　of　fly＇s-eye　lens　arrays　and　separated　by　the　groups,　after　which　divergent　beams　were　formed.　When　the　beams　were　sectioned　by　a　mask　and　passed　through　a　circular　diaphragm,　a　vignetting　effect　was　produced　relative　to　an　excimer　laser　mask　projection　image　lens.　Then　the　irradiating　intensity　at　the　processing　plane　varied　from　the　beam　center　to　its　margin.　This　intensity　difference　in　the　transverse　distribution　would　result　in　microlens　curvature　forming.　This　diaphragm　method　has　the　extinct　advantage　of　short　production　time,　few　steps　and　easy　setup　construction.　(C)　2009　Optical　Society　of　America