Micro　fuel　cells　have　drawn　increasing　attention　because　they　are　promising　choice　of　next　generation　power　sources　for　portable　electronic　devices.　Several　problems,　such　as　poor　micro-machinability　of　graphite,　corrodibility　and　high　density　of　metal,　rise　when　the　conventional　materials　such　as　graphite　and　metal　applied　in　micro　fuel　cells.　The　application　of　silicon　material　in　micro　fuel　cells　is　becoming　popular　because　of　its　low　gas　permeability,　high　thermal　conductivity,　good　property　for　micro　processing.　The　application　of　silicon　material　in　fabrication　of　gas　diffusion　layer　and　proton　exchange　membrane　of　micro　fuel　cells　is　introduced.　Packaging　technique　of　micro　fuel　cell　based　on　silicon　material　is　reviewed.　The　analysis　and　discussion　of　distinguishing　feature　and　long-term　potential　of　the　application　of　silicon　in　micro　fuel　cells　are　conducted.