• 综合
  • 标题
  • 关键词
  • 摘要
  • 学者
  • 期刊-刊名
  • 期刊-ISSN
  • 会议名称
搜索

作者:

Qi, Heng (Qi, Heng.) | Chen, Tao (Chen, Tao.) | Yao, Liying (Yao, Liying.) | Zuo, Tiechuan (Zuo, Tiechuan.)

收录:

EI Scopus SCIE

摘要:

Low-power CO2 laser direct-writing ablation was used to micromachine a microchannel on the polycarbonate substrate in this work. The influence of the process parameters (the laser power, the moving velocity of the laser beam and the scanning times) on the micromachining quality (the depth, the width and their aspect ratio) of the microchannel was experimentally studied. The depth and width of microchannel both increase with the increase of the laser power and the decrease of the moving velocity of the laser beam. When higher laser power and slower moving velocity were used, the polycarbonate surface bore more heat irradiated from the CO2 laser for longer time which results in the formation of deeper and wider molten pool, hence the ability to fabricate bigger microchannel. Because of the effect of the laser power on the depth and width of microchannels, higher aspect (depth/width) ratio could be achieved using slower moving velocity and higher laser power, and it would reach a steady state when the laser power increases to 9.0W possibly caused by the effect of laser power on the different directions of microchannel. The polycarbonate-polycarbonate chip was bonded with hot-press bonding technique. (C) 2008 Elsevier Ltd. All rights reserved.

关键词:

CO2 laser Microchannel Polycarbonate Micromachining Direct-writing ablation

作者机构:

  • [ 1 ] [Qi, Heng]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Chen, Tao]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Yao, Liying]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Zuo, Tiechuan]Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Qi, Heng]Natl Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Chen, Tao]Natl Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Yao, Liying]Natl Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Zuo, Tiechuan]Natl Ctr Laser Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • [Qi, Heng]Beijing Univ Technol, Inst Laser Engn, Pingleyuan 100, Beijing 100124, Peoples R China

电子邮件地址:

查看成果更多字段

相关关键词:

来源 :

OPTICS AND LASERS IN ENGINEERING

ISSN: 0143-8166

年份: 2009

期: 5

卷: 47

页码: 594-598

4 . 6 0 0

JCR@2022

ESI学科: ENGINEERING;

JCR分区:2

中科院分区:1

被引次数:

WoS核心集被引频次: 36

SCOPUS被引频次: 39

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 1

在线人数/总访问数:825/3898990
地址:北京工业大学图书馆(北京市朝阳区平乐园100号 邮编:100124) 联系我们:010-67392185
版权所有:北京工业大学图书馆 站点建设与维护:北京爱琴海乐之技术有限公司