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摘要:
(Ta2O5)(1-x)(TiO2)(x) system ceramics has been studied intensively as a promising dielectric material for next generation of high density dynamic random access memories instead of SiO2 and Si3N4. It is found that the dielectric permittivity of (Ta2O5)(1-x)(TiO2)(x) ceramics was dependent of fabrication process. But in the previous work, their calcining and sintering time were too long, generally for 24 h or even more. A relatively quick sintering process was provided which calcining and sintering time can be decreased to 12 h at 1200 C and 1 h at 1550 C, respectively. This kind of sintering process can save a lot of energy and time that is In favor of the industrial production. Under this sintering process, the composition dependent dielectric properties of (Ta2O5)(1-x)(TiO2)(x) ceramics have been studied in a wide range of composition (0.01 <= x <= 0.20), and the dielectric constants of most compositions can be drastically enhanced. The maximum dielectric value can reach 216 at composition x=0.04. In the meantime, the mechanism of improvement of ceramic dielectric constants sintered at 1550 degrees C was also discussed.
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来源 :
JOURNAL OF ELECTROCERAMICS
ISSN: 1385-3449
年份: 2008
期: 1-4
卷: 21
页码: 577-580
1 . 7 0 0
JCR@2022
ESI学科: MATERIALS SCIENCE;
JCR分区:2