Highly　oriented　BiVO4　films　were　synthesized　on　glass　substrates　by　modified　chemical　bath　deposition　(CBD).　The　influence　of　the　deposition　parameters　as　temperature　and　time　of　deposition　on　the　rate　of　process　and　the　quality　of　BiVO4　films　was　studied　by　XRD,　Raman　Spectroscopy　and　SEM.　The　film　deposited　at　90　degrees　C　for　12　h　was　dense　and　uniform.　The　BiVO4　thin　film　under　this　optimal　depositing　conditions　was　consisted　of　octagonal　crystalline　grains　in　a　narrow　size　distribution　with　an　average　size　of　about　7　mu　m,　showing　a　(004)　preferential　orientation.