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Author:

Chen Hao (Chen Hao.) | Deng Jin-Xiang (Deng Jin-Xiang.) (Scholars:邓金祥) | Liu Jun-Kai (Liu Jun-Kai.) | Zhou Tao (Zhou Tao.) | Zhang Yan (Zhang Yan.) | Chen Guang-Hua (Chen Guang-Hua.)

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EI Scopus SCIE PKU CSCD

Abstract:

Phase transitions between the polytypes of boron nitride and the influence of defect and impurity on preparation of c-BN thin film are studied from energy and structure aspects. A pathway from h-BN to c-BN is analysed, namely: h-BN -> r-BN -> c-BN. The transformation from h-BN to c-BN is more difficult than that from r-BN to c-BN. The energy barrier is very high in direct transformation from h-BN to c-BN, but it is very low from r-BN to c-BN. In fact, defects and impurities in c-BN thin films may favorably drive the transformation from h-BN to c-BN. Defects and impurities can reduce the energy barrier for the transformation sufficiently enough for it to proceed under conditions obtainable in common laboratories. Based on the theoreticd model, we developed a new method to prepare c-BN thin film (three-step method). The effect of time and substrate bias voltage on the first step of preparation of c-BN thin film is investigated. The study proves that 5 min and -180V is very favorable. The c-BN thin film that content with cubic phase exceeding 80% can be repeatedly prepared using the three-step method. Results of experiments accord with the theoreticat model very well.

Keyword:

bias voltage cubic boron nitride defect energy barrier

Author Community:

  • [ 1 ] Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100022, Peoples R China
  • [ 2 ] Beijing Univ Technol, Sch Mat Sci & Engn, Beijing 100022, Peoples R China

Reprint Author's Address:

  • 邓金祥

    [Deng Jin-Xiang]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100022, Peoples R China

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Source :

ACTA PHYSICA SINICA

ISSN: 1000-3290

Year: 2007

Issue: 6

Volume: 56

Page: 3418-3427

1 . 0 0 0

JCR@2022

ESI Discipline: PHYSICS;

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 2

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