• 综合
  • 标题
  • 关键词
  • 摘要
  • 学者
  • 期刊-刊名
  • 期刊-ISSN
  • 会议名称
搜索

作者:

Chen Hao (Chen Hao.) | Deng Jin-Xiang (Deng Jin-Xiang.) (学者:邓金祥) | Liu Jun-Kai (Liu Jun-Kai.) | Zhou Tao (Zhou Tao.) | Zhang Yan (Zhang Yan.) | Chen Guang-Hua (Chen Guang-Hua.)

收录:

EI Scopus SCIE PKU CSCD

摘要:

Phase transitions between the polytypes of boron nitride and the influence of defect and impurity on preparation of c-BN thin film are studied from energy and structure aspects. A pathway from h-BN to c-BN is analysed, namely: h-BN -> r-BN -> c-BN. The transformation from h-BN to c-BN is more difficult than that from r-BN to c-BN. The energy barrier is very high in direct transformation from h-BN to c-BN, but it is very low from r-BN to c-BN. In fact, defects and impurities in c-BN thin films may favorably drive the transformation from h-BN to c-BN. Defects and impurities can reduce the energy barrier for the transformation sufficiently enough for it to proceed under conditions obtainable in common laboratories. Based on the theoreticd model, we developed a new method to prepare c-BN thin film (three-step method). The effect of time and substrate bias voltage on the first step of preparation of c-BN thin film is investigated. The study proves that 5 min and -180V is very favorable. The c-BN thin film that content with cubic phase exceeding 80% can be repeatedly prepared using the three-step method. Results of experiments accord with the theoreticat model very well.

关键词:

bias voltage cubic boron nitride defect energy barrier

作者机构:

  • [ 1 ] Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100022, Peoples R China
  • [ 2 ] Beijing Univ Technol, Sch Mat Sci & Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • 邓金祥

    [Deng Jin-Xiang]Beijing Univ Technol, Sch Appl Math & Phys, Beijing 100022, Peoples R China

电子邮件地址:

查看成果更多字段

相关关键词:

来源 :

ACTA PHYSICA SINICA

ISSN: 1000-3290

年份: 2007

期: 6

卷: 56

页码: 3418-3427

1 . 0 0 0

JCR@2022

ESI学科: PHYSICS;

JCR分区:2

被引次数:

WoS核心集被引频次: 2

SCOPUS被引频次:

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

近30日浏览量: 2

在线人数/总访问数:408/2923354
地址:北京工业大学图书馆(北京市朝阳区平乐园100号 邮编:100124) 联系我们:010-67392185
版权所有:北京工业大学图书馆 站点建设与维护:北京爱琴海乐之技术有限公司