CeO2　is　considered　as　one　of　the　most　lattice　matched　and　chemically　stable　material　for　YBa2Cu3O7-x　coated　conductors.　In　this　paper,　the　epitaxial　growth.　of　CeO2　thin　films　on　both　the　single　crystal　and　the　cube　textured　Ni5W　substrates　by　MOD　method　were　investigated.　Homogeneous　and　crack-free　CeO2　thin　films　with　sharp　biaxially　texture　were　obtained　using　the　precursors　made　by　both　cerium　ethylhexanoate　and　cerium　acetate　precursor　solutions,　followed　by　post-annealing　at　1000-1150　degrees　C　under　flowing　Ar-4%H-2　gas.　The　effects　of　the　various　precursors　and　the　annealing　parameters　on　the　orientation　and　the　roughness　of　the　CeO2　films　on　textured　Ni5W　substrate　were　discussed　in　detail.