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作者:

Wang Ting (Wang Ting.) | Guo Xia (Guo Xia.) (学者:郭霞) | Fang Yuan (Fang Yuan.) | Shen GuangDi (Shen GuangDi.)

收录:

Scopus SCIE

摘要:

An ultraviolet (UV) laser lift-off (LLO) technique was presented to form a roughened surface morphology on GaN membrane grown by metalorganic chemical vapor deposition (MOCVD). The etched surface showed cone-like structures on a free-standing GaN membrane. Based on the scanning electron microscopy (SEM) and atom force microscopy (AFM) measurements, the etching mechanism was proposed, which was related to the different decomposition depth caused by the dislocations in the GaN membrane. The etching efficiency and morphology of GaN by the LLO technique and the photoelectrochemical (PEC) wet etching technique was compared and analyzed. This roughed cone-like surface morphology by LLO can enhance the external efficiency of vertical structure n-side-up GaN-based light-emitting diodes (LEDs) simultaneously while being released of the performance constrains impeded by sapphire.

关键词:

GaN roughening laser lift-off chemical wet etch

作者机构:

  • [ 1 ] Beijing Inst Technol, Sch Mechatron Engn, Beijing 100081, Peoples R China
  • [ 2 ] Beijing Univ Technol, Beijing Optoelect Technol Lab, Inst Elect Informat & Control Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • [Wang Ting]Beijing Inst Technol, Sch Mechatron Engn, Beijing 100081, Peoples R China

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来源 :

CHINESE SCIENCE BULLETIN

ISSN: 1001-6538

年份: 2007

期: 7

卷: 52

页码: 1001-1005

JCR分区:2

被引次数:

WoS核心集被引频次: 5

SCOPUS被引频次: 6

ESI高被引论文在榜: 0 展开所有

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