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作者:

Hu, Dongqing (Hu, Dongqing.) | Han, Baodong (Han, Baodong.) | Xie, Shushan (Xie, Shushan.) | Jia, Yunpeng (Jia, Yunpeng.) | Kang, Baowei (Kang, Baowei.)

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摘要:

On the basis of the proximity gettering of platinum by vacancy defects which are induced by proton irradiation, local platinum doping is realized. This method is used as a local lifetime control technology for high-power diodes. The theoretical dependence of electrically active Pt concentration C-Pts on the concentration of irradiation-induced defects C-V, is also studied. The diodes' reverse performance parameters are measured. At low proton irradiation doses, the quantities of platinum gettered by irradiation-induced defects are enhanced when the irradiation dose increases. This can improve the device's performance. When the proton irradiation dose is high enough, the peak concentration of gettered platinum tends to saturate. This is consistent with the theoretical result.

关键词:

gettering efficiency irradiation dose localized platinum doping platinum gettering power diode

作者机构:

  • [ 1 ] Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • [Hu, Dongqing]Beijing Univ Technol, Coll Elect & Control Engn, Beijing 100022, Peoples R China

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来源 :

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS

ISSN: 0021-4922

年份: 2007

期: 2

卷: 46

页码: 566-568

1 . 5 0 0

JCR@2022

ESI学科: PHYSICS;

JCR分区:3

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WoS核心集被引频次: 0

SCOPUS被引频次: 2

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