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The C12-sensitive heteropolysiloxanes(HPS) film was formed on the interdigital capacitor based on silicon dioxide by means of sol-gel process and spin-on technique. Measurements of interdigital capacitance were performed at room temperature for frequencies 100 Hz, 1 kHz and 10 kHz. It is shown that there is a linear relationship between the capacitance and the concentration of chlorine gas. Influences of the measurement frequency and film thickness of silicate on the sensitivity of the sensor to C12 gas were discussed. And organically modified N,N-diethylaminopropyl-trimethoxysilane (APMS) had a much higher sensitivity.
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RARE METAL MATERIALS AND ENGINEERING
ISSN: 1002-185X
Year: 2006
Volume: 35
Page: 152-154
0 . 7 0 0
JCR@2022
ESI Discipline: MATERIALS SCIENCE;
JCR Journal Grade:3
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WoS CC Cited Count: 0
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 0