The　effects　of　substrate-placing　manner,　deposition　temperature　and　solution　concentration　on　the　preparation　of　ZnO　films　by　chemical　bath　deposition　were　investigated　in　this　work.　The　structures　and　the　morphologies　of　as-deposited　ZnO　films　were　characterized　by　X-ray　diffraction　and　scanning　electron　microscope,　respectively.　The　results　show　that　compared　with　vertically　insertion,　floating　the　substrates　on　the　solutions　could　greatly　improve　the　c-axis　orientation　of　the　films.　The　growth　of　ZnO　films　with　orientation　would　also　be　favored　at　lower　precursor　concentrations　and　temperatures.　When　the　concentration　of　Zn(CH3COO)(2)center　dot　2H(2)O　is　0.033　M/L　and　the　deposited　temperature　is　60　degrees　C,　ZnO　films　which　are　well　crystallized　and　highly　c-axis　orientated　were　obtained.