Biaxially　textured　Ni-5　at.%W　substrates　have　been　prepared　by　cold　rolling,　followed　by　three　different　annealing　routes.　In　this　paper,　the　processes　of　melting　Ni　and　W　metals,　flat　rolling,　various　annealing　methods　are　described　in　detail.　The　Ni-5　at.%W　tapes　annealed　under　either　high　vacuum　or　flowing　Ar　(7%　H-2)　gas　were　characterized　by　X-ray　pole　figures,　ODF,　EBSD　as　well　as　AFM　analysis.　The　texture　analysis　indicated　that　as　fabricated　tapes　have　a　sharp　cube　texture　formed　after　annealing　at　a　wide　temperature　range　of　800-1100　degrees　C.　The　high　quality　of　cube　orientation　on　tapes　was　obtained　after　a　two-step　annealing　(TSA),　where　the　percentage　of　the　cube　texture　component　was　as　high　as　93.5%　within　a　misorientation　angle　smaller　than　8　degrees　from　EBSD　analysis.　Furthermore,　it　was　also　observed　that　the　number　of　twin　boundaries　in　this　tape　decreased　with　respect　to　that　of　tapes　annealed　both　in　vacuum　and　one-step　gas　annealing.　From　AFM　on　1　gm　2　areas,　it　was　concluded　that　the　roughness　(RMS)　on　the　tape　surface　reached　0.98　nm.　(c)　2006　Elsevier　B.V.　All　rights　reserved.