Transmission　electron　microscopy　is　used　to　investigate　the　structural　characteristics　of　epitaxial　ZnO　thin　films　grown　on　(LaAlO3)(0.3)(Sr0.5Ta0.5O3)(0.7)(111)　(LSAT)　by　rf　plasma-assisted　molecular　beam　epitaxy.　It　is　found　that　the　growth　temperature　plays　a　key　role　in　the　formation　of　microstructures　in　ZnO　film.　Growth　temperature　dependence　of　rotation　domain,　interface　and　dislocation　structures　is　studied,　and　the　mechanism　for　polarity　selection　is　discussed.　(c)　2005　Elsevier　B.V.　All　rights　reserved.