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作者:

Ji, Y (Ji, Y.) | Guo, HS (Guo, HS.) | Zhong, TX (Zhong, TX.) | Zhang, H (Zhang, H.) | Quan, XL (Quan, XL.) | Zhang, YQ (Zhang, YQ.) | Xu, XD (Xu, XD.)

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摘要:

Oxygen environment was applied to the scanning electron microscopy (SEM) analysis of insulating samples. In the high vacuum SEM, a local oxygen pressure was provided, and in the environmental SEM, oxygen atmosphere was used instead of water, the commercial mode. The charging effects in the SEM observation and component characterization of samples such as Al2O3, Al(OH)(3), Mg(OH)(2) and others can be eliminated or significantly reduced. The oxygen environment does not only provide a new approach to releasing the charging difficulty in the analyses using electron beam as a probe, but also provide an insightful hint to the understanding of the charging processes in general. (c) 2004 Elsevier B.V. All rights reserved.

关键词:

ESEM SEM charge effect oxygen environment

作者机构:

  • [ 1 ] Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100022, Peoples R China

通讯作者信息:

  • [Ji, Y]Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Ping Le Yuan 100, Beijing 100022, Peoples R China

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来源 :

ULTRAMICROSCOPY

ISSN: 0304-3991

年份: 2005

期: 3

卷: 103

页码: 191-198

2 . 2 0 0

JCR@2022

ESI学科: CHEMISTRY;

JCR分区:1

被引次数:

WoS核心集被引频次: 10

SCOPUS被引频次: 13

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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