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作者:

Yu, HP (Yu, HP.) | Sui, YK (Sui, YK.) | Zhang, FY (Zhang, FY.) | Chang, XA (Chang, XA.) | An, GP (An, GP.)

收录:

Scopus SCIE PKU CSCD

摘要:

The growth of a 300mm large diameter single crystal silicon is one of the active branches in silicon material research and production. It is known from experiments that the shape of the growth interface, the temperature distribution in the melt etc. are sensitive to the melt motion. However it is quite difficult to experimentally visualize the convection of melt, temperature and oxygen field. Thus it is extremely difficult to quantitatively determine how melt motion influence the quality of crystal by experiments. Numerical simulations can provide detailed information of melt motion, distribution of temperature and so on, which can guide the growth of silicon. In this paper, a low Reynolds number K - epsilon model was used for the simulation of a 300mm large diameter silicon crystal growth. The velocity field and temperature field with and without a cusp magnetic field were visualized. Through this study how a cusp magnetic field influences the melt convection was clarified.

关键词:

cusp magnetic field CZSi method numerical simulation

作者机构:

  • [ 1 ] Beijing Univ Technol, Coll Mech Engn & Applying Elect Tech, Beijing 100022, Peoples R China
  • [ 2 ] Gen Res Inst NonFerrous Met, Beijing 100088, Peoples R China
  • [ 3 ] Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • [Yu, HP]Beijing Univ Technol, Coll Mech Engn & Applying Elect Tech, Beijing 100022, Peoples R China

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来源 :

JOURNAL OF INORGANIC MATERIALS

ISSN: 1000-324X

年份: 2005

期: 2

卷: 20

页码: 453-458

1 . 7 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

JCR分区:3

被引次数:

WoS核心集被引频次: 2

SCOPUS被引频次:

ESI高被引论文在榜: 0 展开所有

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