Aligned　carbon　nanofibers　(ACNFs)　were　grown　on　silicon　substrates　coated　with　NiFe　catalyst　films　by　negative　bias-enhanced　hot　filament　chemical　vapor　deposition　(CVD).　The　growth　and　structure　of　the　aligned　carbon　nanofibers　were　investigated　by　scanning　electron　microscopy　(SEM).　The　results　indicate　that　the　aligned　carbon　nanofibers　could　be　synthesized　after　the　glow　discharge　appears　when　the　negative　bias　is　higher　than　a　certain　value,　while　they　are　bent　if　the　glow　discharge　does　not　appear.　Furthermore,　the　diameters　of　the　aligned　carbon　nanofibers　are　reduced　and　their　lengths　are　increased　with　increasing　the　negative　bias.　It　is　shown　that　the　glow　discharge　resulting　from　the　negative　bias　plays　an　important　role　in　the　growth　of　aligned　carbon　nanofibers.　Here,　the　effects　of　the　glow　discharge　on　the　growth　and　structure　of　the　aligned　carbon　nanofibers　are　discussed.　(C)　2004　Elsevier　B.V.　All　rights　reserved.