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摘要:
The first author invented a unique diamond-like carbon (DLC) grinding wheel, in which the DLC fibres were made by rolling Al sheets coated with DLC films and aligned normally to the grinding wheel surface by laminating Al sheets together with DLC fibres [K. Yamaguchi, Y. Wei, M. Takeuchi, Development of DLC fibre grinding wheel, in: Proceedings of the Vernal Meeting of the JSPE, Tokyo, 16-18 March 1999, p. 260]. In this paper, the formation process of DLC fibres and the fabrication process of a DLC fibre wheel were investigated. Many grinding experiments were also carried out on a precision NC plane milling machine using a newly developed DLC wheel. Grinding of specimens of silicon wafers, optical glasses, quartz, granites and hardened die-steel SKD11 demonstrated the capabilities to nanometer surface finish. A smooth surface with a roughness value of Ra 2.5 nm (Ry 26 nm) was achieved. (C) 2004 Elsevier Inc. All rights reserved.
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来源 :
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
ISSN: 0141-6359
年份: 2004
期: 4
卷: 28
页码: 419-425
3 . 6 0 0
JCR@2022
ESI学科: ENGINEERING;
JCR分区:1
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