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作者:

Ji, Y (Ji, Y.) | Guo, HS (Guo, HS.) | Xu, XD (Xu, XD.) | Shi, JX (Shi, JX.) | Zhong, TX (Zhong, TX.)

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EI Scopus SCIE

摘要:

A scanning electron microscope (SEM), in an oxygen environment, was set-up to study the charging phenomena and charge compensation of oxides. Under an O-2 pressure between 2.9 x 10(-3) and 2 x 10(-2) Pa, the charging of an amorphous SiO2 with Cu stripes and a polycrystalline Al2O3 were reduced. The charging effect and charge compensation of oxides may be due to the formation of surface anion vacancies under primary electron bombardment and the replenishment of oxygen ions under an oxygen atmosphere. The Auger electron spectroscopy (AES) of Al2O3 proved that the charging effect of the Al2O3 was completely compensated in the environment of O-2 at pressures down to 5 x 10(-6) Pa.

关键词:

charging effect oxygen environment SEM oxides

作者机构:

  • [ 1 ] Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100022, Peoples R China

通讯作者信息:

  • [Ji, Y]Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100022, Peoples R China

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来源 :

INSTRUMENTATION SCIENCE & TECHNOLOGY

ISSN: 1073-9149

年份: 2004

期: 1

卷: 32

页码: 61-68

1 . 6 0 0

JCR@2022

ESI学科: ENGINEERING;

JCR分区:3

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SCOPUS被引频次: 1

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