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CNx, thin films with a high nitrogen content were prepared on ITO conductive, glass substrates by cathode electrodeposition, using dicyandiamide(C2H4N4) in acetone as the precursors. The surface morphologies of CNx thin films were observed by thermal field emission scanning electron microscopy (SEM) The size of CNx got a nanometer level, with about 80 nm minimum size. The N /C atomic ratio and bond state in the films were studied by X-ray photoelectron spectroscopy (XPS). The maximum value of the N/ C atomic ratio was 1. 08. Carbon and nitrogen existed mainly in the form of C-N bond, with little C = N bond. Fourier transform infrared (FTIR) spectroscopy supports the existence of C -N covalent bond. Through the UV-Vis. absorption phenomenon, the ultraviolet radiation (200-280 nm) could be transmitted. The electrical resistivities of the films were-in the-range of 10(12)-10(16) Omega . cm.
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