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准分子激光投影直刻微加工制作微机械
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简要描述了新开发的准分子激光微加工装备的结构特点 .系统地研究了准分子激光直刻高分子聚合物的机制及其与微结构制作精度的关系 .并以PVC微结构原型及其复制件的制作为例 ,讨论了准分子激光投影直刻用于LIGA工艺的可行性 .研究表明准分子激光投影直刻微加工技术可用于制作微机械 .
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CNKI:JEXK200101002
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Chinese
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2001,中国科学E辑
2002,核技术
2002,过滤与分离
2001,应用激光
Source :
中国科学E辑:技术科学
Year: 2001
Issue: 01
Page: 13-18
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 1
Affiliated Colleges:
材料与制造学部 激光工程研究院
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