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作者:

Wen, Zhenyu (Wen, Zhenyu.) | Li, Jianjun (Li, Jianjun.) | Cao, Hongkang (Cao, Hongkang.) | Wang, Jun (Wang, Jun.) | Wang, Xiaoqian (Wang, Xiaoqian.)

收录:

CPCI-S EI

摘要:

N-type AlGaAs Bragg reflectors (DBRs) are an important part of optoelectronic devic-type AlGaAs Bragg reflectors (DBRs) are an important part of optoelectronic devices such as light-emitting diodes and vertical cavity surface emitting lasers and reducing the series resistance is critical to the performance of the device. In this paper, four kinds of modulation-doped 20-cycle N-type Al0.5Ga0.5As/AlAs DBR were grown on N-type GaAs substrate by MOCVD. The white light reflection spectrum measurement results show that the peak wavelength of the epitaxial wafer meets the requirements of red light band. The upper and lower electrodes were prepared for each of the four structures, and the IV characteristics were tested after Cleavaged.The results show that the series resistance of the epitaxial wafer with the AlGaAs layer concentration of 1x10(19) cm(-3) and the AlAs layer doping concentration of 5x10(18) cm(-3) is the smallest. The resistance value was 1.36x10(-6) Omega cm(2). It shows that the modulation doping method can effectively reduce the series resistance of DBR.

关键词:

DBR MOCVD Modulation doped Series resistance

作者机构:

  • [ 1 ] [Wen, Zhenyu]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Minist Educ, Beijing, Peoples R China
  • [ 2 ] [Li, Jianjun]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Minist Educ, Beijing, Peoples R China
  • [ 3 ] [Cao, Hongkang]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Minist Educ, Beijing, Peoples R China
  • [ 4 ] [Wang, Jun]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Minist Educ, Beijing, Peoples R China
  • [ 5 ] [Wang, Xiaoqian]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Minist Educ, Beijing, Peoples R China

通讯作者信息:

  • [Li, Jianjun]Beijing Univ Technol, Fac Informat Technol, Key Lab Optoelect Technol, Minist Educ, Beijing, Peoples R China

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来源 :

NANO PHOTONICS: MATERIALS AND DEVICES

ISSN: 0277-786X

年份: 2020

卷: 11440

语种: 英文

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