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作者:

Piao, Linhua (Piao, Linhua.) | Piao, Ran (Piao, Ran.) | Ren, Anrun (Ren, Anrun.) | Hu, Yonghui (Hu, Yonghui.)

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CPCI-S

摘要:

This paper reported the design, simulation, fabrication and performance test of fluidic gyroscope, which is fabricated by using the integration process of MEMS process of silicon wafer and high-precision laser cutting and modeling process on PMMA. The 3D transient numerical analysis based on the fluid-structure interaction was used to calculate the flow movement. Calculations and results indicate that sensitivity SFz is 2.0 mu V/degrees/s, the nonlinearity is less than 0.5%. Open flow channel includes two inlets and one outlet inside the sensitive component. With the driving of piezoelectric pump, the fluid flows into the channel through two inlets and gathers together. The flow from the nozzle forms the sensitive jet, without a circulation flow inside the sensitive component. The sensitive component structure is simple. Sensitive jet is deflected along Z-axis by the Coriolis force, the flow exchanges heat with hotwires. Therefore, Wheatstone bridge outputs an unbalanced voltage proportional to angular velocity.

关键词:

hotwire angular velocity open airflow channel fluidic gyroscope MEMS

作者机构:

  • [ 1 ] [Piao, Linhua]Beijing Informat Sci & Technol Univ, Key Lab Beijing Sensor, Beijing, Peoples R China
  • [ 2 ] [Ren, Anrun]Beijing Informat Sci & Technol Univ, Key Lab Beijing Sensor, Beijing, Peoples R China
  • [ 3 ] [Hu, Yonghui]Beijing Informat Sci & Technol Univ, Key Lab Beijing Sensor, Beijing, Peoples R China
  • [ 4 ] [Piao, Ran]Beijing Univ Technol, Dept Informat, Beijing, Peoples R China

通讯作者信息:

  • [Piao, Linhua]Beijing Informat Sci & Technol Univ, Key Lab Beijing Sensor, Beijing, Peoples R China

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来源 :

PROCEEDINGS OF 2018 IEEE 4TH INFORMATION TECHNOLOGY AND MECHATRONICS ENGINEERING CONFERENCE (ITOEC 2018)

年份: 2018

页码: 1822-1826

语种: 英文

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