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作者:

Zhang, Jintao (Zhang, Jintao.) | Cui, Jing (Cui, Jing.) (学者:崔晶) | Lu, Yuanshen (Lu, Yuanshen.) | Zhang, Xu (Zhang, Xu.) | Hu, Xiaohui (Hu, Xiaohui.)

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摘要:

A flexible capacitive tactile sensor with micro needle structure is designed in this paper for the palm and fingers of the manipulator. The sensor has better sensitivity, stability and repeatability and the spatial layout of the manipulator tactile sensor is designed in this paper. The main raw material PDMS is prepared to meet the requirements of a flexible tactile sensor. The silicon-based MEMS technology is used to achieve a tiny micro needle structure. Experimental results show that the sensor is proved to work well and able to guarantee a better sensitivity at 30 N pressure.

关键词:

Micro needle Silicon-based MEMS technology Flexible tactile sensor

作者机构:

  • [ 1 ] [Zhang, Jintao]Beijing Univ Technol, Beijing, Peoples R China
  • [ 2 ] [Cui, Jing]Beijing Univ Technol, Beijing, Peoples R China
  • [ 3 ] [Lu, Yuanshen]Beijing Univ Technol, Beijing, Peoples R China
  • [ 4 ] [Zhang, Xu]Acad Sci, Inst Semicond, Beijing, Peoples R China
  • [ 5 ] [Hu, Xiaohui]Acad Sci, Inst Semicond, Beijing, Peoples R China

通讯作者信息:

  • [Zhang, Xu]Acad Sci, Inst Semicond, Beijing, Peoples R China

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来源 :

COGNITIVE SYSTEMS AND SIGNAL PROCESSING, ICCSIP 2016

ISSN: 1865-0929

年份: 2017

卷: 710

页码: 303-309

语种: 英文

被引次数:

WoS核心集被引频次: 1

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

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