Spatial　light　modulator　(SLM)　has　various　of　applications　in　the　field　of　imaging,　beam　shaping,　adaptive　optics　and　so　on.　While　SLM　is　used　as　an　aberration　correction　element　in　super-resolution　microscopy,　the　surface　flatness　of　SLM　could　affect　the　imaging　performance　of　the　system　due　to　the　higher　sensitivity　to　aberrations　of　these　kind　microscopic　techniques.　In　this　paper,　the　optical　surface　flatness　of　SLM　is　measured　experimentally　by　employing　the　image　plane　digital　holography.　The　topography　of　SLM　is　retrieved　from　the　captured　hologram.　Aiming　to　the　application　of　SLM　as　an　adaptive　correction　element　in　super　resolution　microscopy,　the　aberrations　introduced　by　the　surface　flatness　of　SLM　are　further　evaluated　and　corrected　in　the　same　optical　system.