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作者:

Zheng, Chong (Zheng, Chong.) | Chen, Tao (Chen, Tao.) | Hu, Anming (Hu, Anming.) | Liu, Shibing (Liu, Shibing.) (学者:刘世炳) | Li, Junwei (Li, Junwei.)

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CPCI-S EI Scopus

摘要:

Recent progresses in femtosecond laser (fs) manufacturing have already proved that fs laser is a powerful tool in three dimensional internal structure fabrications. However, most studies are mainly focused on realize such structures in inorganic transparent dielectric, such as photosensitive glass and fused silica, etc. In this study, we present two methods to fabricate embedded internal 3D structures in a polymer dielectric material polymethyl methacrylate (PMMA). Both continuous hollow structure such as microfluidic channels and discrete hollow structures such as single microcavities are successfully fabricated with the help of femtosecond lasers. Among them, complicated 3D microchannel with a total length longer than 10mm and diameters around 80 mu m to 200 mu m are fabricated with a low repetition rate Ti: sapphire femtosecond laser by direct laser writing at a speed ranging from 25 mu m/s to 2000 mu m/s; microcavities which function as concave microball lenses (CMBLs) and can be applied in super-wide-angle imaging are fabricated with a high repetition rate femtosecond fiber laser due to the distinct heat accumulation effect after 5s irradiation with the tightly focused fs laser beam. These new approaches proved that femtosecond laser direct writing technology has great application potential in 3D integrated devices manufacturing in the future.

关键词:

concave microball lens (CMBL) femtosecond laser integrated device internal manufacturing microchannel microfluidic chip PMMA

作者机构:

  • [ 1 ] [Zheng, Chong]Beijing Univ Technol, Inst Laser Engn, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 2 ] [Chen, Tao]Beijing Univ Technol, Inst Laser Engn, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 3 ] [Liu, Shibing]Beijing Univ Technol, Inst Laser Engn, Pingleyuan 100, Beijing 100124, Peoples R China
  • [ 4 ] [Zheng, Chong]Sci & Technol Opt Radiat Lab, Beijing 100854, Peoples R China
  • [ 5 ] [Li, Junwei]Sci & Technol Opt Radiat Lab, Beijing 100854, Peoples R China
  • [ 6 ] [Zheng, Chong]Univ Tennessee, Dept Mech Aerosp & Biomed Engn, Knoxville, TN 37996 USA
  • [ 7 ] [Hu, Anming]Univ Tennessee, Dept Mech Aerosp & Biomed Engn, Knoxville, TN 37996 USA

通讯作者信息:

  • [Zheng, Chong]Beijing Univ Technol, Inst Laser Engn, Pingleyuan 100, Beijing 100124, Peoples R China;;[Zheng, Chong]Sci & Technol Opt Radiat Lab, Beijing 100854, Peoples R China;;[Zheng, Chong]Univ Tennessee, Dept Mech Aerosp & Biomed Engn, Knoxville, TN 37996 USA

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来源 :

ADVANCED LASER PROCESSING AND MANUFACTURING

ISSN: 0277-786X

年份: 2016

卷: 10018

语种: 英文

被引次数:

WoS核心集被引频次: 1

SCOPUS被引频次: 2

ESI高被引论文在榜: 0 展开所有

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