Hydrostatic　guideway　is　the　key　component　of　heavy-duty　CNC　machine　tool　feed　system.　The　working　performance　of　the　hydrostatic　guideway　have　great　influence　to　the　accuracy　of　machine　tool.　In　order　to　analysis　the　performance　of　the　oil　pad,　a　calculation　method　based　on　Reynolds　equation　and　the　thin　plate　deformation　equation,　considering　the　fluid-structure　coupling,　is　established.　The　influence　of　film　thickness,　oil　supply　parameter　and　inclination　to　the　performance　of　the　oil　pad　are　discussed.　It　is　shows　that　loading　capacity　declined　compared　with　the　situation　which　is　not　considering　the　fluid-structure　coupling.