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作者:

Koelling, S. (Koelling, S..) | Plantenga, R. C. (Plantenga, R. C..) | Hauge, H. I. T. (Hauge, H. I. T..) | Ren, Y. (Ren, Y..) | Li, A. (Li, A..) (学者:李昂) | Verheijen, M. A. (Verheijen, M. A..) | Boj, S. Conesa (Boj, S. Conesa.) | Assali, S. (Assali, S..) | Koenraad, P. M. (Koenraad, P. M..) | Bakkers, E. P. A. M. (Bakkers, E. P. A. M..)

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摘要:

Silicon-Germanium in a hexagonal crystal-structure is a candidate material for a direct band-gap group IV semiconductor that can be integrated into the CMOS process. It has recently been synthesized as a crystalline shell grown epitaxial around a nanowire core of hexagonal Gallium-Phosphide. In order to study the optical properties of this newly generated material and evaluate its potential for building optical devices it is necessary to grow defect and impurity free hexagonal Silicon-Germanium. Impurity detection and mapping in nano-structures is however challenging as most bulk and thin film characterization methods cannot be used. Here we show that Atom Probe Tomography can be used to map the impurities in hexagonal shells of Silicon-Germanium and Silicon. This will allow to optimize growth of hexagonal Silicon-Germanium nanocrystals towards impurity free, optically active crystals.

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作者机构:

  • [ 1 ] [Koelling, S.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 2 ] [Plantenga, R. C.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 3 ] [Hauge, H. I. T.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 4 ] [Ren, Y.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 5 ] [Li, A.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 6 ] [Verheijen, M. A.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 7 ] [Boj, S. Conesa]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 8 ] [Assali, S.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 9 ] [Koenraad, P. M.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 10 ] [Bakkers, E. P. A. M.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands
  • [ 11 ] [Li, A.]Beijing Univ Technol, Beijing 100024, Peoples R China
  • [ 12 ] [Verheijen, M. A.]Philips Innovat Serv, NL-5656 AE Eindhoven, Netherlands
  • [ 13 ] [Boj, S. Conesa]Kavli Inst, Quantum Transport Grp, NL-2628 CJ Delft, Netherlands
  • [ 14 ] [Bakkers, E. P. A. M.]Kavli Inst, Quantum Transport Grp, NL-2628 CJ Delft, Netherlands
  • [ 15 ] [Assali, S.]Polytech Montreal, Dept Engn Phys, Montreal, PQ H3C 3A7, Canada

通讯作者信息:

  • [Koelling, S.]TU Eindhoven, Photon & Semicond Nanophys, NL-5600 MB Eindhoven, Netherlands

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来源 :

SIGE, GE, AND RELATED MATERIALS: MATERIALS, PROCESSING, AND DEVICES 7

ISSN: 1938-5862

年份: 2016

期: 8

卷: 75

页码: 751-760

语种: 英文

被引次数:

WoS核心集被引频次: 6

SCOPUS被引频次: 6

ESI高被引论文在榜: 0 展开所有

万方被引频次:

中文被引频次:

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