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作者:

Yan, Ruixuan (Yan, Ruixuan.) | Wei, Xianglei (Wei, Xianglei.) | He, Chunhua (He, Chunhua.) | Zhao, Qiancheng (Zhao, Qiancheng.) | Yang, Zhenchuan (Yang, Zhenchuan.) | Yan, Guizhen (Yan, Guizhen.)

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CPCI-S

摘要:

In this paper, the influence of MEMS gyroscope's tuning voltage on its resonant frequency is investigated analytically and experimentally. The theoretical deduction shows that, with the increase of the tuning voltage, the frequency of drive mode is constant due to area-changing electrostatic driving scheme, while the square of the frequency of the sense mode is linearly dependent on the square of the tuning voltage due to the gap-changing electrostatic sensing scheme. Experimental results demonstrate good agreement with the theoretical analysis. Furthermore, the frequency of sense mode is affected by the structure and fabrication process of MEMS gyroscopes.

关键词:

resonant frequency MEMS gyroscope mode-matching

作者机构:

  • [ 1 ] [Yan, Ruixuan]Beijing Univ Technol, Coll Elect Informat & Control Engn, Beijing 100871, Peoples R China
  • [ 2 ] [Wei, Xianglei]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 3 ] [He, Chunhua]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 4 ] [Zhao, Qiancheng]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 5 ] [Yang, Zhenchuan]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
  • [ 6 ] [Yan, Guizhen]Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China

通讯作者信息:

  • [Yan, Ruixuan]Beijing Univ Technol, Coll Elect Informat & Control Engn, Beijing 100871, Peoples R China

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来源 :

MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)

ISSN: 2474-3747

年份: 2015

页码: 435-437

语种: 英文

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WoS核心集被引频次: 1

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