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[会议论文]

A Comprehensive Analytical Model and Experimental Validation of Z-shaped Electrothermal Microactuators

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作者:

Zhang, Zhuo (Zhang, Zhuo.) | Zhang, Weize (Zhang, Weize.) | Wu, Qiyang (Wu, Qiyang.) | 展开

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CPCI-S EI Scopus

摘要:

This paper presents a comprehensive analytical model for a Z-shaped electrothermal microactuator operating in air condition. The model provides the estimate of the tip displacement of the microactuator directly based on a voltage difference applied on the both anchors of the actuator. In an attempt to improve the accuracy of modeling, the impact of the shuttle and multiple pairs of beams are included in the model. The numerical simulations with a Finite Element (FE) model are conducted using the commercialized FE software ANSYS to verify the analytical model. The experimental testing is performed as well to validate the analytical model. The analytical results based on the proposed model agree well with both the FE modeling and experimental results.

关键词:

Thermal-mechanical MEMS Analytical model Z-shaped electrothermal microactuator

作者机构:

  • [ 1 ] [Zhang, Zhuo]Beijing Univ Technol, Sch Mech & Elect Engn, Beijing, Peoples R China
  • [ 2 ] [Yu, Yueqing]Beijing Univ Technol, Sch Mech & Elect Engn, Beijing, Peoples R China
  • [ 3 ] [Zhang, Weize]McGill Univ, Dept Mech Engn, Montreal, PQ, Canada
  • [ 4 ] [Wu, Qiyang]McGill Univ, Dept Mech Engn, Montreal, PQ, Canada
  • [ 5 ] [Liu, Xinyu]McGill Univ, Dept Mech Engn, Montreal, PQ, Canada
  • [ 6 ] [Zhang, Xuping]Aarhus Univ, Dept Engn, Aarhus, Denmark
  • [ 7 ] [Zhang, Xuping]Aarhus Univ, Aarhus Sch Engn, Aarhus, Denmark

通讯作者信息:

  • [Zhang, Xuping]Aarhus Univ, Dept Engn, Aarhus, Denmark

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相关文章:

来源 :

RECENT ADVANCES IN MECHANISM DESIGN FOR ROBOTICS

ISSN: 2211-0984

年份: 2015

卷: 33

页码: 177-187

语种: 英文

被引次数:

WoS核心集被引频次: 12

SCOPUS被引频次: 15

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