A　vibration　suppression　method　using　switching　control　is　proposed　for　smooth　motion　control　of　SCARA　robot　in　wafer　transition.　The　wafer　robot　is　composed　of　joints　integrated　with　magenetorhelogical　damper.　Vibration　often　occurs　when　acceleration　jump　abruptly,　especially　in　the　end　of　operation　period.　The　residual　vibration　decreases　the　safety　of　wafer　operation　and　extends　the　settling　time.　Firstly,　Vibration　sources　of　the　driving　joints　are　analyzed.　Strategy　by　using　switching　control　is　analyzed.　And　dynamics　model　of　robot　joint　with　elasticity　element　is　established.　Magenetorhelogical　damper　is　introduced　into　the　design　of　joint　structure　to　suppress　vibration.　It　could　provide　reliable　suppression　effectiveness.　Control　structure　of　joint　with　elasticity　and　MR　damper　is　discussed.　And　a　PD　controller　is　applied　into　joint　motion　control.　Frequency　characteristic　of　the　joint　demonstrates　the　stability　of　the　control　loop.　Finally,　simulation　is　implemented　to　verify　the　effectiveness　of　the　proposed　method.