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摘要：
This paper presents the system design of a high order single loop electromechanical Sigma Delta accelerometer. The noise-coupled is employed in the fourth-order feed-forward micro-accelerometer Sigma Delta modulator to provide fifth-order noise shaping performance. It is implemented without degrading the loop stability and without changing original loop coefficients of the fourth-order accelerometer.
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来源 ：
MANUFACTURING PROCESS AND EQUIPMENT, PTS 1-4
ISSN： 1022-6680
年份： 2013
卷： 694-697
页码： 971-975
语种： 英文
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