MEMS　is　believed　as　a　most　promising　technology　in　future.　DHM　is　a　powerful　technique　to　characterize　the　behavior　of　MEMS.　In　the　reconstruction　process　of　a　digital　hologram,　aberrations　always　exist,　which　is　always　removed　by　the　software　installed　in　the　computer.　We　propose　a　method　to　obtain　an　aberration　free　digital　hologram.　The　optical　arrangement　is　presented　to　verify　the　possibility　of　our　method,　which　is　then　improved　by　a　space-fiber　hybrid　system.　The　system　is　flexible　and　useful　in　designing　a　practical　digital　holography　microscope.