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作者:

Li, Hao-qun (Li, Hao-qun.) | Zhang, Zhi-jie (Zhang, Zhi-jie.) | Chen, Li-hua (Chen, Li-hua.) | Fan, Jin-hong (Fan, Jin-hong.)

收录:

CPCI-S

摘要:

Pull-in parameters analysis, such as pull-in voltage and pull-in displacement, of contact type electrostatically actuated MEMS switches is investigated. Using Euler-Bernoulli beam theory, a cantilever beam model is established. Based on the method of Galerkin decomposition, the model is changed to a discrete modal equations, including nonlinear electrostatic force. Based on the equilibrium stability analysis, pull-in voltage and pull-in displacement are discussed. The simulation results can be used as design tools and rules to improve switch performance.

关键词:

beam microswitch pull-in parameters

作者机构:

  • [ 1 ] [Li, Hao-qun]Beijing Univ Technol, Coll Mech Engn, Beijing, Peoples R China
  • [ 2 ] [Zhang, Zhi-jie]Beijing Univ Technol, Coll Mech Engn, Beijing, Peoples R China
  • [ 3 ] [Chen, Li-hua]Beijing Univ Technol, Coll Mech Engn, Beijing, Peoples R China
  • [ 4 ] [Fan, Jin-hong]Beijing Univ Technol, Coll Mech Engn, Beijing, Peoples R China

通讯作者信息:

  • [Li, Hao-qun]Beijing Univ Technol, Coll Mech Engn, Beijing, Peoples R China

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来源 :

PROCEEDINGS OF THE 2011 INTERNATIONAL CONFERENCE ON INFORMATICS, CYBERNETICS, AND COMPUTER ENGINEERING (ICCE2011), VOL 2: INFORMATION SYSTEMS AND COMPUTER ENGINEERING

ISSN: 1867-5662

年份: 2011

卷: 111

页码: 633-639

语种: 英文

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