收录:
摘要:
Pull-in parameters analysis, such as pull-in voltage and pull-in displacement, of contact type electrostatically actuated MEMS switches is investigated. Using Euler-Bernoulli beam theory, a cantilever beam model is established. Based on the method of Galerkin decomposition, the model is changed to a discrete modal equations, including nonlinear electrostatic force. Based on the equilibrium stability analysis, pull-in voltage and pull-in displacement are discussed. The simulation results can be used as design tools and rules to improve switch performance.
关键词:
通讯作者信息:
电子邮件地址:
来源 :
PROCEEDINGS OF THE 2011 INTERNATIONAL CONFERENCE ON INFORMATICS, CYBERNETICS, AND COMPUTER ENGINEERING (ICCE2011), VOL 2: INFORMATION SYSTEMS AND COMPUTER ENGINEERING
ISSN: 1867-5662
年份: 2011
卷: 111
页码: 633-639
语种: 英文
归属院系: