With　the　continuous　development　of　micromachining,　the　technology　of　making　microfluidic　chip　has　been　improved　enormously.　Micromachining　quality　requested　by　microfluidic　chip　and　advantages　of　fabricating　microfluidic　chip　using　excimer　laser　is　presented　in　this　paper.　And　applications　of　making　microfluidic　chip　using　excimer　laser　is　introduced　with　typical　micro-structures　like　micro-channels,　micro-holes,　micro-lens,　and　micro-nozzles.