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作者:

Xie, Yi Yang (Xie, Yi Yang.) | Xu, Chen (Xu, Chen.) (学者:徐晨) | Kan, Qiang (Kan, Qiang.) | Wang, Chun Xia (Wang, Chun Xia.) | Wang, Bao Qiang (Wang, Bao Qiang.) | Liu, Ying Ming (Liu, Ying Ming.) | Chen, Hong Da (Chen, Hong Da.) | Shen, Guang Di (Shen, Guang Di.)

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CPCI-S EI Scopus

摘要:

In this paper, we report the single mode operation of PC-VCSEL. The PC- VCSEL is similar to standard VCSEL except that it has photonic crystal defined by holes in the top distributed Bragg reflector. The two-dimensional photonic crystal (2-D PhC) structure is applied to lateral mode control of VCSEL. The optical confinement in VCSEL is realized by adding air-holes in the top (DBR). The holes are arranged periodically such that they form a triangular or square symmetric pattern. Light emitting aperture is formed by removing some air holes centered at photonic crystal pattern. By adjusting the photonic crystal parameters and air-holes depth, a variety of optical mode characteristic can be achieved. The characteristics of lasing lateral modes in PhC-VCSEL were analyzed by etching depth related effective index method. The contribution of PhC parameters such as lattice constant a, holes diameter d and uniform material index n to lateral mode characteristic is investigated systematically. Then two dimensional PhC was fabricated using electron beam lithography (EBL) and inductive coupled plasma reactive ion etching (ICP-RIE) on the surface of the VCSEL's top DBR. A single-fundamental-mode output power bigger than 1mW, threshold current below 5 mA, Full Width Half Maximum (FWHM) of lasing spectrum is less than 0.06 nm and over 30dB SMSR PhC-VCSEL was obtained. The lateral mode characteristics affected by different current injection was also considered.

关键词:

vertical cavity surface emitting laser photonic crystal single fundamental mode

作者机构:

  • [ 1 ] [Xie, Yi Yang]Beijing Univ Technol, Key Lab Opt Elect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 2 ] [Xu, Chen]Beijing Univ Technol, Key Lab Opt Elect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 3 ] [Wang, Bao Qiang]Beijing Univ Technol, Key Lab Opt Elect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 4 ] [Liu, Ying Ming]Beijing Univ Technol, Key Lab Opt Elect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 5 ] [Shen, Guang Di]Beijing Univ Technol, Key Lab Opt Elect Technol, Minist Educ, Beijing 100124, Peoples R China

通讯作者信息:

  • [Xie, Yi Yang]Beijing Univ Technol, Key Lab Opt Elect Technol, Minist Educ, Beijing 100124, Peoples R China

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来源 :

5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS

ISSN: 0277-786X

年份: 2010

卷: 7657

语种: 英文

被引次数:

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