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Transparent thin films are manufactured by PLD (pulsed laser deposition) in different oxygen pressure. The various property of samples is measured by Atomic Force Microscope (AFM). X-ray diffraction (XRD) and optical transmission spectrum. All samples retain the original structure in wurtzite lattice by XRD, there is not being of metallic cobalt or other impurity phase with the limit detection. The surface morphology of the films observes the smoother than that in undoped ZnO thin film. The transparency of thin films has altered greatly with the different oxygen pressure or not by PLD, which is shown that the oxygen pressure has impacted on the transparency of the film and surface morphology. And UV-visible spectra fully have been demonstrated the presence of Co2+ to substitute for Zn2+ in the films with the different oxygen pressure.
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