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[期刊论文]
立方氮化硼薄膜研究的新进展
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低压下沉积c-BN薄膜是近年来凝聚态物理和材料科学研究的热门课题之一.我们应用热丝辅助射频等离子体化学气相沉积技术,在多种衬底上沉积了BN薄膜,并系统研究了热丝温度、衬底温度和射频电压等工艺参数对BN薄膜中立方相含量的影响.
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CNKI:WLZZ807.010
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Chinese
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Related Article:
2001,半导体学报
2006,2006年全国功能材料学术年会
2006,全国薄膜技术学术研讨会
2008,物理学报
Source :
物理
Year: 1998
Issue: 07
Page: 3-5
Cited Count:
WoS CC Cited Count: 0
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 2
Affiliated Colleges:
理学部 物理与光电学院
材料与制造学部 本学院/部未明确归属的数据
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