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作者:

Chen Jimin (Chen Jimin.) (学者:陈继民) | Yin Yuehua (Yin Yuehua.)

收录:

CPCI-S

摘要:

The RF MEMS Switch is the key element in the field of microwave and mm-wave signal control. In recent years it has been investigated widely because of its advantages of low insertion loss, low power consumption, high isolation, excellent compatibility with silicon and high linearity over PIN diode or FET counterpart. Meanwhile as the development of laser technology it has demonstrated extensively to be a very valuable tool for the development of high quality processes in micro-applications. The use of lasers in the field of MEMS is multiple. Starting from characterization, testing and going to technology and working principle of the microsystems and nanosystems, the lasers find applications in any of these areas. The paper overviews some of the laser micro fabrication in RF MEMS switches such as laser deposition, laser lithography, laser direct writing etc. We present the respective technologies, their working principles, their advantages and drawbacks. In some cases the examples of microstructures realized by using laser techniques have been showed.

关键词:

Laser deposition Laser direct writing lithography Micro fabrication RF MEMS

作者机构:

  • [ 1 ] [Chen Jimin]Beijing Univ Technol, Natl Ctr Laser Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Yin Yuehua]Beijing Univ Technol, Natl Ctr Laser Technol, Beijing 100124, Peoples R China

通讯作者信息:

  • 陈继民

    [Chen Jimin]Beijing Univ Technol, Natl Ctr Laser Technol, Beijing 100124, Peoples R China

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来源 :

URSI 2009)

年份: 2009

页码: 65-69

语种: 英文

被引次数:

WoS核心集被引频次: 1

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