In　this　paper,　we　introduce　a　compact　measuring　system,　to　analyze　microstructure　force　property.　The　system　is　specially　designed　in　which　a　mechanical　test　machine,　a　PCB　board　based　on　an　USB　connection　for　device　driving　and　data　collection,　and　processing　software　were　contained.　This　system　can　be　used　for　measuring　deformation　characteristics　of　MEMS　structures　by　bending　method.　To　confirm　the　feasibility　of　the　system,　an　experiment　was　performed　on　a　micro　pillar.