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作者:

Zhu, Yanxu (Zhu, Yanxu.) | Li, Qixuan (Li, Qixuan.) | Yang, Zhuang (Yang, Zhuang.) | Wang, Cai (Wang, Cai.) | Wei, Zhao (Wei, Zhao.)

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EI SCIE

摘要:

In this paper, we take advantage of the high sensitivity of two-dimensional electron gas concentration in the heterojunction channel of a GaN high electron mobility transistor (HEMT) to device surface states and gate voltages. By integrating a HEMT with ferroelectric materials with photovoltaic effects, a photo-sensitive gate HEMT photodetector based on ferroelectric integration is obtained. By exploring the ferroelectric and composite film sputtering growth epitaxial atmosphere, a high-performance PZT/ZnO composite ferroelectric film grown in an oxygen-containing atmosphere is obtained. Comparing the PZT and LiNbO3 (LN) ferroelectric thin films prepared with or without the buffer layer, the following conclusions are obtained. The quantum efficiency of the PZT/ZnO film increases by 240% and 596% at the peak of 300-400 nm, reaching 14.55%; the residual polarization of the PZT film obtained in an oxygen-containing atmosphere reaches 52.31 μC/cm2; the PZT/ZnO composite film has better fatigue characteristics. The GaN HEMT detector prepared by using magnetron sputtered PZT/ZnO as the sensing gate under the oxygen atmosphere has a photocurrent increment of 11.51 mA under ultraviolet light and a responsivity of 111A/W at 365 nm. At the same time, the device has τr = 0.12 s and τf = 8.3 s transient response. Theresearch in this paper shows that a new structure photodetector based on a GaN HEMT has excellent ultraviolet light response, which provides a new research direction for the light detection mechanism. © 2021 Author(s).

关键词:

Buffer layers Composite films Ferroelectric films Ferroelectricity Ferroelectric thin films Film preparation Gallium nitride Heterojunctions High electron mobility transistors III-V semiconductors Lithium compounds Niobium compounds Oxygen Photocurrents Photodetectors Photons Photosensitivity Photovoltaic effects Thin films Transient analysis Two dimensional electron gas Ultraviolet radiation Zinc compounds

作者机构:

  • [ 1 ] [Zhu, Yanxu]Key Laboratory of Photoelectron Technology Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 2 ] [Li, Qixuan]Key Laboratory of Photoelectron Technology Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 3 ] [Yang, Zhuang]Key Laboratory of Photoelectron Technology Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 4 ] [Wang, Cai]Key Laboratory of Photoelectron Technology Ministry of Education, Beijing University of Technology, Beijing; 100124, China
  • [ 5 ] [Wei, Zhao]Key Laboratory of Photoelectron Technology Ministry of Education, Beijing University of Technology, Beijing; 100124, China

通讯作者信息:

  • [li, qixuan]key laboratory of photoelectron technology ministry of education, beijing university of technology, beijing; 100124, china

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来源 :

AIP Advances

年份: 2021

期: 3

卷: 11

1 . 6 0 0

JCR@2022

ESI学科: MATERIALS SCIENCE;

ESI高被引阀值:8

被引次数:

WoS核心集被引频次: 0

SCOPUS被引频次: 9

ESI高被引论文在榜: 0 展开所有

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