Synthesis and characterization of single-crystalline δ-Ta2O5 epitaxial films on Y-stabilized ZrO2 (111) substrates - 文章详情页

作者：

Le, Yong (Le, Yong.) | Ma, Xiaochen (Ma, Xiaochen.) | Wang, Di (Wang, Di.) | Xiao, Hongdi (Xiao, Hongdi.) | Ma, Jin (Ma, Jin.)

收录：

EI Scopus SCIE

摘要：

Hexagonal　tantalum　pentoxide　(δ-Ta2O5)　epitaxial　films　were　successfully　prepared　on　Y-stabilized　ZrO2　(YSZ)　(111)　substrates　by　metalorganic　chemical　vapor　deposition.　The　crystal　structure　and　optical　characteristics　of　the　deposited　films　as　a　function　of　the　substrate　temperature　were　investigated.　High　quality　stoichiometric　single-crystalline　δ-Ta2O5　film　was　gained　at　the　optimum　epitaxial　growth　temperature　of　800　°C　and　the　full-width　at　half-maximum　of　the　ω　rocking　curve　of　δ-Ta2O5　(0001)　was　only　0.066°.　The　heteroepitaxial　relationship　between　the　δ-Ta2O5　film　and　YSZ　(111)　substrate　was　identified　as　δ-Ta2O5　(0001)YSZ　(111)　with　δ-Ta2O5　[21¯1¯0YSZ　[101‾]　and　was　illustrated　in　a　schematic　diagram.　This　proposed　film　makes　adequate　preparations　for　developing　a　range　of　ultra　wide　band　gap　semiconductor　devices.　©　2020

关键词：

Semiconductor devices Tantalum oxides Zirconia Substrates Energy gap Film preparation Crystal structure Schematic diagrams Metallorganic chemical vapor deposition Yttria stabilized zirconia Epitaxial films Wide band gap semiconductors Yttrium metallography

作者机构：

[ 1 ] [Le, Yong]School of Microelectronics, Shandong University, Jinan; 250100, China
[ 2 ] [Ma, Xiaochen]College of Microelectronics, Beijing University of Technology, Beijing; 100124, China
[ 3 ] [Wang, Di]School of Microelectronics, Shandong University, Jinan; 250100, China
[ 4 ] [Xiao, Hongdi]School of Microelectronics, Shandong University, Jinan; 250100, China
[ 5 ] [Ma, Jin]School of Microelectronics, Shandong University, Jinan; 250100, China

通讯作者信息：

[ma, xiaochen]college of microelectronics, beijing university of technology, beijing; 100124, china

电子邮件地址：

jinma_sdu@126.comemailxiaochenma0531@gmail.com) Ma, Xiaochen(xiaochenma0531@gmail.com

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