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作者:

Zhang, Xin (Zhang, Xin.) | Zhang, Liang (Zhang, Liang.) | Mironov, Sergey (Mironov, Sergey.) | Xiao, Rongshi (Xiao, Rongshi.) (学者:肖荣诗) | Guo, Liang (Guo, Liang.) | Huang, Ting (Huang, Ting.) (学者:黄婷)

收录:

EI SCIE

摘要:

Femtosecond laser has been widely utilized for modification of crystal structure to achieve desired functions. So far, however, the effect of crystallographic orientation on the induced structure by femtosecond laser processing has yet been comprehensively studied. The present work is undertaken in an attempt to fill this gap in our knowledge. To this end, commercial-purity Si is used as a target material and high-resolution transmission electron microscopy as well as electron backscatter diffraction are applied to examine the irradiation-induced microstructural changes. The structural response of the pulsed material is found to be principally influenced by the crystallographic orientation of the target surface. Specifically, at the surface orientation close to {111}, a pronounced amorphization effect is observed whereas no disordered material is detected at the orientations close to {100}. This phenomenon could be explained by the lowest crystallization speed required by the (111) surface due to its smallest surface energy. Compared with nanosecond laser, non-thermal melting induced by femtosecond laser induces mild thermal gradient and favors recrystallization.

关键词:

Amorphization Crystallographic orientation Femtosecond laser Silicon

作者机构:

  • [ 1 ] [Zhang, Xin]Beijing Univ Technol, Fac Mat & Mfg, Highpower & Ultrafast Laser Mfg Lab, Beijing 100124, Peoples R China
  • [ 2 ] [Mironov, Sergey]Beijing Univ Technol, Fac Mat & Mfg, Highpower & Ultrafast Laser Mfg Lab, Beijing 100124, Peoples R China
  • [ 3 ] [Xiao, Rongshi]Beijing Univ Technol, Fac Mat & Mfg, Highpower & Ultrafast Laser Mfg Lab, Beijing 100124, Peoples R China
  • [ 4 ] [Huang, Ting]Beijing Univ Technol, Fac Mat & Mfg, Highpower & Ultrafast Laser Mfg Lab, Beijing 100124, Peoples R China
  • [ 5 ] [Zhang, Liang]Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Guangdong, Peoples R China
  • [ 6 ] [Guo, Liang]Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Guangdong, Peoples R China

通讯作者信息:

  • 黄婷

    [Huang, Ting]Beijing Univ Technol, Fac Mat & Mfg, Highpower & Ultrafast Laser Mfg Lab, Beijing 100124, Peoples R China;;[Guo, Liang]Southern Univ Sci & Technol, Dept Mech & Energy Engn, Shenzhen 518055, Guangdong, Peoples R China

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来源 :

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

ISSN: 0947-8396

年份: 2021

期: 3

卷: 127

2 . 7 0 0

JCR@2022

ESI学科: PHYSICS;

ESI高被引阀值:7

被引次数:

WoS核心集被引频次: 12

SCOPUS被引频次: 14

ESI高被引论文在榜: 0 展开所有

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中文被引频次:

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