CeO2　has　been　considered　as　one　of　the　most　lattice　compatible　and　chemically　stable　materials　for　YBa2Cu3O7-x　coated　conductors.　In　this　paper,　we　presented　the　epitaxial　growth　of　CeO2　thin　film　on　both　YSZ　single　crystal　and　cube　textured　Ni5W　substrates　by　MOD　method.　Homogenous,　crack-free　and　dense　CeO2　thin　films　on　both　substrates　with　sharp　biaxially　cube　texture　were　fabricated　by　post-annealing　the　precursor　films　at　1000-1150　degrees　C.　For　the　CeO2　film　on　the　textured　Ni5W　substrate,　the　FWHM　values　of　(111)　Phi-scan　and　(002)　rocking　curve　were　around　6　degrees　and　7　degrees,　respectively,　the　surface　roughness　was　less　than　2　nm　over　an　area　of　1　mu　m　x　1　mu　m　observed　by　AFM.　It　was　found　that　the　CeO2　thin　film　improved　both　the　in-plane　orientation　and　surface　roughness　of　the　Ni5W　substrate,　indicating　that　the　as　deposited　CeO2　films　were　suitable　for　the　further　growth　of　YBCO　superconductor　layer.